High temperature LGS SAW gas sensor
نویسندگان
چکیده
Novel surface acoustic wave (SAW) devices using the recent langasite (LGS) family of crystals have been designed, fabricated, and tested for high temperature (up to 750 ◦C) gas sensor applications. The devices were fabricated using platinum (Pt) and palladium (Pd) thin film technology as electrodes and sensing films to withstand temperatures in excess of 1000 ◦C. Combinations of platinum and platinum/tungsten trioxide (Pt/WO3) films have been used in the detection of C2H4 in N2 (C2H4/N2). Original all palladium metallic structures have been employed in the detection of H2 in a N2 carrier gas (H2/N2). SAW resonator structures using these films have been fabricated and continuously cycled from 250 to 750 ◦C for periods up to 3 weeks, with degradations in the |S21| response up to 7 dB. Constantly held at 250 ◦C for 12 weeks, t s P 2 S r ©
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High Temperature SAW Gas Sensor on Langasite
Novel Surface Acoustic Wave (SAW) devices using the new langasite (LGS) family of crystals have been designed, fabricated, and tested for high temperature (up to 750°C) gas sensor applications. The devices were fabricated using platinum (Pt) and palladium (Pd) thin film technology and were mounted in a high temperature sealed stainless steel chamber for gas testing. The high temperature SAW sen...
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